JPH0393762U - - Google Patents
Info
- Publication number
- JPH0393762U JPH0393762U JP293490U JP293490U JPH0393762U JP H0393762 U JPH0393762 U JP H0393762U JP 293490 U JP293490 U JP 293490U JP 293490 U JP293490 U JP 293490U JP H0393762 U JPH0393762 U JP H0393762U
- Authority
- JP
- Japan
- Prior art keywords
- hydrochloric acid
- acid gas
- gas
- water
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010790 dilution Methods 0.000 claims description 2
- 239000012895 dilution Substances 0.000 claims description 2
- 238000007865 diluting Methods 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP293490U JPH0393762U (en]) | 1990-01-16 | 1990-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP293490U JPH0393762U (en]) | 1990-01-16 | 1990-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0393762U true JPH0393762U (en]) | 1991-09-25 |
Family
ID=31506779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP293490U Pending JPH0393762U (en]) | 1990-01-16 | 1990-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0393762U (en]) |
-
1990
- 1990-01-16 JP JP293490U patent/JPH0393762U/ja active Pending
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